The Resource 2000 5th International Symposium on Plasma Process-Induced Damage : May 22-24, 2000, Santa Clara, California, USA, Mitsumasa Koyanagi, Manfred Englehardt, and Calvin T. Gabriel, editors ; technical co-sponsors, American Vacuum Society, IEEE/Electron devices Society, Japanese Society of Applied Physics

2000 5th International Symposium on Plasma Process-Induced Damage : May 22-24, 2000, Santa Clara, California, USA, Mitsumasa Koyanagi, Manfred Englehardt, and Calvin T. Gabriel, editors ; technical co-sponsors, American Vacuum Society, IEEE/Electron devices Society, Japanese Society of Applied Physics

Label
2000 5th International Symposium on Plasma Process-Induced Damage : May 22-24, 2000, Santa Clara, California, USA
Title
2000 5th International Symposium on Plasma Process-Induced Damage
Title remainder
May 22-24, 2000, Santa Clara, California, USA
Statement of responsibility
Mitsumasa Koyanagi, Manfred Englehardt, and Calvin T. Gabriel, editors ; technical co-sponsors, American Vacuum Society, IEEE/Electron devices Society, Japanese Society of Applied Physics
Title variation
  • P2ID
  • Plasma Process-Induced Damage, 2000 5th International Symposium on
Creator
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
OCL
Dewey number
621.3815/2
Illustrations
illustrations
Index
index present
Language note
English
LC call number
TK7871.85
LC item number
.I5834 2000
Literary form
non fiction
http://bibfra.me/vocab/lite/meetingDate
2000
http://bibfra.me/vocab/lite/meetingName
International Symposium on Plasma Process-Induced Damage
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Koyanagi, Mitsumasa
  • Engelhardt, Manfred
  • Gabriel, Calvin T
  • American Vacuum Society
  • IEEE Electron Devices Society
  • Ōyō Butsuri Gakkai
http://library.link/vocab/subjectName
  • Semiconductor wafers
  • Semiconductors
  • Plasma radiation
  • Plasma radiation
  • Semiconductor wafers
  • Semiconductors
  • Engineering & Applied Sciences
  • Electrical & Computer Engineering
  • Electrical Engineering
Label
2000 5th International Symposium on Plasma Process-Induced Damage : May 22-24, 2000, Santa Clara, California, USA, Mitsumasa Koyanagi, Manfred Englehardt, and Calvin T. Gabriel, editors ; technical co-sponsors, American Vacuum Society, IEEE/Electron devices Society, Japanese Society of Applied Physics
Instantiates
Publication
Copyright
Note
  • "P2ID"--Cover
  • "IEEE Catalog Number 00TH8479"--Title page verso
Bibliography note
Includes bibliographical references and author index
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Control code
47883592
Dimensions
unknown
Extent
1 online resource ([6], i, 172 pages)
Form of item
online
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
illustrations
Sound
unknown sound
Specific material designation
remote
System control number
(OCoLC)47883592
Label
2000 5th International Symposium on Plasma Process-Induced Damage : May 22-24, 2000, Santa Clara, California, USA, Mitsumasa Koyanagi, Manfred Englehardt, and Calvin T. Gabriel, editors ; technical co-sponsors, American Vacuum Society, IEEE/Electron devices Society, Japanese Society of Applied Physics
Publication
Copyright
Note
  • "P2ID"--Cover
  • "IEEE Catalog Number 00TH8479"--Title page verso
Bibliography note
Includes bibliographical references and author index
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Control code
47883592
Dimensions
unknown
Extent
1 online resource ([6], i, 172 pages)
Form of item
online
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
illustrations
Sound
unknown sound
Specific material designation
remote
System control number
(OCoLC)47883592

Library Locations

    • Curtis Laws Wilson LibraryBorrow it
      400 West 14th Street, Rolla, MO, 65409, US
      37.955220 -91.772210
Processing Feedback ...