Coverart for item
The Resource Semiconductor fabrication : technology and metrology, Dinesh C. Gupta, editor, (electronic resource)

Semiconductor fabrication : technology and metrology, Dinesh C. Gupta, editor, (electronic resource)

Label
Semiconductor fabrication : technology and metrology
Title
Semiconductor fabrication
Title remainder
technology and metrology
Statement of responsibility
Dinesh C. Gupta, editor
Contributor
Subject
Language
eng
Member of
Cataloging source
DLC
Dewey number
621.381/52
LC call number
TK7871.85
LC item number
.S4617 1989
http://library.link/vocab/relatedWorkOrContributorDate
1988
http://library.link/vocab/relatedWorkOrContributorName
  • Gupta, D. C.
  • ASTM Committee F-1 on Electronics
  • Semiconductor Equipment and Materials Institute
  • Symposium on Semiconductor Processing
Series statement
STP
Series volume
990
http://library.link/vocab/subjectName
Semiconductors
Label
Semiconductor fabrication : technology and metrology, Dinesh C. Gupta, editor, (electronic resource)
Instantiates
Publication
Note
  • Papers originally presented at the Fifth International Symposium on Semiconductor Processing, held at Santa Clara, Calif., on Feb. 1-5, 1988, sponsored by ASTM Committee F-1 on Electronics and Semiconductor Equipment & Materials Institute
  • "ASTM publication code number (PCN) 04-990000-46"--T.p. verso
Bibliography note
Includes bibliographical references and indexes
Control code
OCM1bookssj0001184371
Dimensions
unknown
Isbn
9780803112735
Lccn
89033789
Specific material designation
remote
System control number
(WaSeSS)bookssj0001184371
Label
Semiconductor fabrication : technology and metrology, Dinesh C. Gupta, editor, (electronic resource)
Publication
Note
  • Papers originally presented at the Fifth International Symposium on Semiconductor Processing, held at Santa Clara, Calif., on Feb. 1-5, 1988, sponsored by ASTM Committee F-1 on Electronics and Semiconductor Equipment & Materials Institute
  • "ASTM publication code number (PCN) 04-990000-46"--T.p. verso
Bibliography note
Includes bibliographical references and indexes
Control code
OCM1bookssj0001184371
Dimensions
unknown
Isbn
9780803112735
Lccn
89033789
Specific material designation
remote
System control number
(WaSeSS)bookssj0001184371

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