Coverart for item
The Resource Semiconductor fabrication : technology and metrology, Dinesh C. Gupta, editor

Semiconductor fabrication : technology and metrology, Dinesh C. Gupta, editor

Label
Semiconductor fabrication : technology and metrology
Title
Semiconductor fabrication
Title remainder
technology and metrology
Statement of responsibility
Dinesh C. Gupta, editor
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
DLC
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
bibliography
http://library.link/vocab/relatedWorkOrContributorDate
1988
http://library.link/vocab/relatedWorkOrContributorName
  • Gupta, D. C.
  • ASTM Committee F-1 on Electronics
  • Semiconductor Equipment and Materials Institute
  • Symposium on Semiconductor Processing
Series statement
STP
Series volume
990
http://library.link/vocab/subjectName
Semiconductors
Label
Semiconductor fabrication : technology and metrology, Dinesh C. Gupta, editor
Instantiates
Publication
Note
  • "ASTM publication code number (PCN) 04-990000-46"--T.p. verso
  • Papers originally presented at the Fifth International Symposium on Semiconductor Processing, held at Santa Clara, Calif., on Feb. 1-5, 1988, sponsored by ASTM Committee F-1 on Electronics and Semiconductor Equipment & Materials Institute
Bibliography note
Includes bibliographies and indexes
Carrier category
volume
Carrier category code
  • nc
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Control code
19723356
Dimensions
24 cm
Extent
476 pages
Isbn
9780803112735
Lccn
89033789
Media category
unmediated
Media MARC source
rdamedia
Media type code
  • n
Other physical details
illustrations
System control number
(WaOLN)1228746
Label
Semiconductor fabrication : technology and metrology, Dinesh C. Gupta, editor
Publication
Note
  • "ASTM publication code number (PCN) 04-990000-46"--T.p. verso
  • Papers originally presented at the Fifth International Symposium on Semiconductor Processing, held at Santa Clara, Calif., on Feb. 1-5, 1988, sponsored by ASTM Committee F-1 on Electronics and Semiconductor Equipment & Materials Institute
Bibliography note
Includes bibliographies and indexes
Carrier category
volume
Carrier category code
  • nc
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Control code
19723356
Dimensions
24 cm
Extent
476 pages
Isbn
9780803112735
Lccn
89033789
Media category
unmediated
Media MARC source
rdamedia
Media type code
  • n
Other physical details
illustrations
System control number
(WaOLN)1228746

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      37.955220 -91.772210
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